Ozone analyzer uses UV

Needham, Mass-based IN USA Inc. has released the dFFOZ-TR trace dissolved ozone analyzer, an ozone-specific measuring instrument for ultrapure water. By using patented ultraviolet (UV) light absorption technology, the analyzer achieves accurate and stable readings down to 2 parts per billion. It eliminates the likelihood of false alarms because the UV technique is specific to dissolved or residual ozone and immune to cross interference from other gases. A possible application is in ultrapure water stations in wafer fabrication.